| Hexapod | Value |
|---|---|
| X | -4.3 |
| Y | -2.9 |
| TN | Notes |
No TT Res [nm wf] | Modalplot |
|---|---|---|---|
| 20140517_033544 | " | 161 | |
| 20140517_033616 | " | 161 | |
| 20140517_033345 | FLAO CL bin 1, 400 modes, 1 kHz | 159 | |
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